# Abstract

Embedded systems have evolved to more complex assemblies, called Cyber-Physical Systems (CPS), mostly operating through networks and tightly interacting with the environment. As actuators or sensors, micro-electromechanical systems (MEMS) are essential elements in these systems where they are integrated along with control and signal processing units. Designing such solutions requires a multi-domain approach like virtual prototyping. Based on system-level models, this technique allows to anticipate the global behavior in early-design phases and to further refine it in more advanced steps. Integrated circuits were progressively designed with respect to this method, especially through Hardware Description Languages (HDLs) like VHDL or Verilog. By adopting a higher-abstraction degree, SystemC enabled the co-development of hardware/software specific applications. In parallel, the Analog and Mixed-Signal (AMS) extensions proposed in SystemC-AMS partly addressed the increasing amount of analog components and are considered as a promising alternative for the virtual prototyping of heterogeneous systems.

This thesis addresses the system-level modeling and simulation of MEMS devices in SystemC-AMS. First, we evaluate the current capabilities of the standard and supported models of computation in SystemC-AMS. We demonstrate the limitations and the the difficulty to elaborate equivalent models of MEMS devices whose geometry and internal coupling require more detailed descriptions. Second, we propose to directly integrate MEMS reduced models in SystemC-AMS. Model-order reduction is a mathematical technique to decrease the number of degrees of freedom and generate compact models from large-scale systems. We thus integrate the reduced models exported from the finite-element analysis tool MEMS+ and propose an Application Programmable Interface (API) to insert these ad hoc models in SystemC-AMS. After reviewing the main API features, we discuss some improvements of both the standard and the presented solution. Finally, we verify our solution through the use case of an accelerometer and compare the results with the state of the art in terms of modeling accuracy and simulation performance.This thesis introduces a framework to integrate MEMS devices with the surrounding electronics in a unified system-level simulation environment.

# Citation

Please cite using the following BibTex entry:

@phdthesis{vernay:tel-01391819,
TITLE = {{System-level modeling and simulation of microelectromechanical systems for multi-physics virtual prototyping in SystemC-AMS}},
AUTHOR = {Vernay, Benoît},
URL = {http://hal.upmc.fr/tel-01391819},
NUMBER = {2016PA066171},
SCHOOL = {{Universit{\'e} Pierre et Marie Curie - Paris VI}},
YEAR = {2016},
MONTH = Jun,
KEYWORDS = {MEMS ; Microsystems ; Virtual prototyping ; SystemC-AMS ; Simulation haut-niveau ; SystemC ; Micro-syst{\e}mes ; Prototypage virtuel},
TYPE = {Theses},
PDF = {http://hal.upmc.fr/tel-01391819/file/these_archivage_3273889o.pdf},
HAL_ID = {tel-01391819},
HAL_VERSION = {v2},
}
`