This paper proposes a framework for system-level modeling and simulation of a Micro Electro-Mechanical System (MEMS). We show how a reduced-order model of MEMS can be integrated into SystemC-AMS. We propose the use of an external linear algebra library and alternative time integration method. Both are used to customize a Timed Data Flow (TDF) module to address MEMS modeling. Experiments are conducted on a biaxial accelerometer to verify its response to a ramp impulse. Our implementation runs about twice as fast as the state space resolution currently implemented in SystemC-AMS 2.0. Results highlight potential improvements of SystemC-AMS standard to correctly simulate the analog behavior of MEMS devices.


  author={B. Vernay and A. Krust and G. Schröpfer and F. Pêcheux and M. M. Louërat},
  booktitle={2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)},
  title={SystemC-AMS simulation of a biaxial accelerometer based on MEMS model order reduction},
  keywords={accelerometers;linear algebra;micromechanical devices;reduced order systems;state-space methods;MEMS devices;MEMS model order reduction;SystemC-AMS 2.0;SystemC-AMS simulation;SystemC-AMS standard;TDF module;biaxial accelerometer;linear algebra library;microelectromechanical system;ramp impulse;state space resolution;system-level modeling;time integration method;timed data flow;Atmospheric modeling;Hardware;MATLAB;Mathematical model;Micromechanical devices;Read only memory;Standards;Accelerometer;MEMS;Model Order Reduction;Reduced-Order Model;System-level;SystemC AMS},